Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleNew Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM.AuthorsKuesters, Karl Heinz; Beug, Marc Florian; Schroeder, Uwe; Nagel, Nicolas; Bewersdorff, Ulrike; Dallmann, Gerald; Jakschik, Stefan; Knoefler, Roman; Kudelka, Stephan; Ludwig, Christoph; Manger, Dirk; Mueller, Wolfgang; Tilke, ArminPublicationAdvanced Engineering Materials, 2009, Vol 11, Issue 6, p513ISSN1438-1656Publication typeArticleDOI10.1002/adem.200990017