We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure.
- Authors
Lei, Liang; Dong, Bo; Hu, Yuxuan; Lei, Yisong; Wang, Zhizhong; Ruan, Shuangchen
- Abstract
A high-frequency surface acoustic wave (SAW) resonator, based on sandwiched interdigital transducer (IDT), is presented. The resonator has the structure of diamond/AlN/IDT/AlN/diamond, with Si as the substrate. The results show that its phase velocity and electromechanical coupling coefficient are both significantly improved, compared with that of the traditional interdigital transduce-free surface structure. The M2 mode of the sandwiched structure can excite an operation frequency up to 6.15 GHz, with an electromechanical coupling coefficient of 5.53%, phase velocity of 12,470 m/s, and temperature coefficient of frequency of −6.3 ppm/°C. This structure provides a new ideal for the design of high-performance and high-frequency SAW devices.
- Subjects
ACOUSTIC surface waves; ACOUSTIC resonators; INTERDIGITAL transducers; PHASE velocity; DIAMONDS; COUPLED mode theory (Wave-motion)
- Publication
Sensors (14248220), 2022, Vol 22, Issue 17, p6479
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s22176479