Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleElectrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss.AuthorsSatoh, Daisuke; Tanaka, Shuji; Esashi, MasayoshiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2008, Vol 3, Issue 3, p305ISSN1931-4973Publication typeArticleDOI10.1002/tee.20271