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- Title
Growth and Crystallization of SiO 2 /GeO 2 Thin Films on Si(100) Substrates.
- Authors
Antoja-Lleonart, Jordi; Ocelík, Václav; Zhou, Silang; de Hond, Kit; Koster, Gertjan; Rijnders, Guus; Noheda, Beatriz
- Abstract
The growth of α -quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO 2 /GeO 2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α -quartz phase in the form of platelets with lateral sizes above 100 μm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.
- Subjects
PULSED laser deposition; THIN films; CRYSTALLIZATION; ELECTROMECHANICAL devices; ELECTRON diffraction; SILICA films; PIEZOELECTRIC thin films; FERROELECTRIC thin films
- Publication
Nanomaterials (2079-4991), 2021, Vol 11, Issue 7, p1654
- ISSN
2079-4991
- Publication type
Article
- DOI
10.3390/nano11071654