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- Title
Segmented subwavelength silicon gratings manufactured by high productivity microelectronic technologies for linear to radial/azimuthal polarization conversion.
- Authors
Kämpfe, Thomas; Sixt, Pierre; Renaud, Denis; Lagrange, Armelle; Perrin, Fabrice; Parriaux, Olivier
- Abstract
A polarization rotation is realized by subwavelength binary gratings, where the round trip phases of the smallest grating modes are fixed to the smallest possible integer numbers of 2π allowing a phase difference of π between TE and TM polarizations and almost 100% transmission. The principle is applied to a polarization transformation in the 1030 to 1064-nm wavelength range, using a segmented polarization rotating element converting a linearly polarized incidence to a radial or azimuthal polarization distribution. The elevated costs of such kinds of polarization transformers based on assembled birefringent crystals are avoided by using mass-fabrication compatible silicon-on-insulator technology on a wafer scale. It shows the general potential of microelectronic technology, concerning the batch manufacturing of wavelength-scale diffractive, grating-based elements for processing free space waves.
- Subjects
SILICON research; GROUP 14 elements; MICROELECTRONICS; ELECTRONICS; POLARIZATION (Electrochemistry)
- Publication
Optical Engineering, 2014, Vol 53, Issue 10, p1
- ISSN
0091-3286
- Publication type
Article
- DOI
10.1117/1.OE.53.10.107105