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- Title
Application of the dual-beam FIB/SEM to metals research.
- Authors
Sivel, V. G. M.; Van Den Brand, J.; Wang, W. R.; Mohdadi, H.; Tichelaar, F. D.; Alkemade, P. F. A.; Zanbergen, H. W.
- Abstract
The dual-beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy-dispersive X-ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross-sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a grain boundary in a Cu3Au alloy. In both cases, the dual beam succeeded where other methods failed.
- Subjects
MICROSCOPY; ADHESION; ALUMINUM; TRANSMISSION electron microscopy; SEMICONDUCTOR analysis; SCANNING transmission electron microscopy
- Publication
Journal of Microscopy, 2004, Vol 214, Issue 3, p237
- ISSN
0022-2720
- Publication type
Article
- DOI
10.1111/j.0022-2720.2004.01329.x