We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM.
- Authors
Lupini, A. R.; Borisevich, A. Y.; Idrobo, J. C.; Christen, H. M.; Biegalski, M.; Pennycook, S. J.
- Abstract
The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
- Subjects
ELECTRON microscopy; SCANNING transmission electron microscopy; OPTICAL aberrations; OPTICAL resolution; PROTOTYPES
- Publication
Microscopy & Microanalysis, 2009, Vol 15, Issue 5, p441
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1017/S1431927609990389