Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleThe Rise of Scalable Micro/Nanopatterning.AuthorsKe Du; Wathuthanthri, Ishan; Chang-Hwan ChoiSubjectsNANOPATTERNING; NANOMANUFACTURINGPublicationMicromachines, 2017, Vol 8, Issue 9, p275ISSN2072-666XPublication typeArticleDOI10.3390/mi8090275