We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Large-Area, Nanometer-Scale Discrete Doping of Semiconductors via Block Copolymer Self-Assembly.
- Authors
Popere, Bhooshan C.; Russ, Boris; Heitsch, Andrew T.; Trefonas, Peter; Segalman, Rachel A.
- Abstract
The article discusses study on large-area, nanometer-scale discrete doping of semiconductors via block copolymer self-assembly. Topics discussed include boron concentration profiles determined using secondary ion mass spectrometry (SIMS), investigation of transmission electron micrographs of as-doped silicon (Si) substrates and surface morphology of spun-coated films studied using tapping mode atomic force microscopy (AFM) reveals a quasi-hexagonal array of spherical micelles.
- Subjects
SEMICONDUCTOR doping; BLOCK copolymers; MOLECULAR self-assembly; ATOMIC force microscopy; SECONDARY ion mass spectrometry; THIN films; MICELLES
- Publication
Advanced Materials Interfaces, 2015, Vol 2, Issue 18, pn/a
- ISSN
2196-7350
- Publication type
Article
- DOI
10.1002/admi.201500421