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- Title
Impact of Pre-Annealed ZrO 2 Interfacial Layer on the Ferroelectric Behavior of Hf 0.5 Zr 0.5 O 2.
- Authors
Yuan, Xiaobo; Liu, Zongfang; Qi, Jiabin; Xiao, Jinpan; He, Huikai; Tang, Wentao; Lee, Choonghyun; Zhao, Yi
- Abstract
This work systematically investigates the impact of a pre-annealed ZrO2 interfacial layer on the ferroelectric behavior of Hf0.5Zr0.5O2 (HZO) capacitors. The remanent polarization (2Pr) value of HZO capacitors, including configurations such as W/HZO/TiN/p+ Si, W/HZO/(pre-annealed) ZrO2/TiN/p+ Si, W/HZO/SiO2/TiN/p+ Si, and W/HZO/SiO2/p+ Si, exhibits significant variations. The W/HZO/(pre-annealed) ZrO2/TiN/p+ Si capacitor demonstrates superior ferroelectric performance, with a 2Pr value of ~32 µC/cm2. Furthermore, by optimizing the thickness combination of HZO and the pre-annealed ZrO2 interfacial layer, a capacitor with a 10 nm HZO and 2 nm ZrO2 achieves the largest 2Pr value. The pre-annealing process applied to ZrO2 is found to play a very important role in inducing the orthorhombic phase and thus enhancing ferroelectricity. This enhancement is attributed to the pre-annealed 2 nm ZrO2 interfacial layer acting as a structural guide for the subsequent HZO orthorhombic phase, thereby improving the ferroelectric performance of HZO capacitors. These findings provide a comprehensive explanation and experimental verification of the impact of pre-annealed ZrO2 on ferroelectric devices, offering novel insights for the optimization of ferroelectric properties.
- Subjects
FERROELECTRIC devices; FERROELECTRICITY; CAPACITORS; BARIUM titanate; LEAD titanate
- Publication
Electronics (2079-9292), 2024, Vol 13, Issue 1, p3
- ISSN
2079-9292
- Publication type
Article
- DOI
10.3390/electronics13010003