Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleMultilayer analysis of ion implanted GaAs using spectroscopic ellipsometry.AuthorsErman, M.; Theeten, J. B.PublicationSurface & Interface Analysis: SIA, 1982, Vol 4, Issue 3, p98ISSN0142-2421Publication typeArticleDOI10.1002/sia.740040305