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- Title
Optimal Energy Dispersive X-ray Microanalysis of Low-Z Elements.
- Authors
Ritchie, Nicholas W M; Newbury, Dale E
- Abstract
This article discusses the advantages and challenges of using low incident beam energies for energy dispersive electron beam X-ray microanalysis of low-Z elements. Lowering the beam energy reduces absorption effects and allows for easier distinction of characteristic X-ray lines. However, surface contamination becomes a concern, and accurately accounting for the background signal becomes more important. The article also mentions the complexity of the continuum signal at low beam energies and the dependence on accurate mass-absorption coefficients. Despite these challenges, high accuracy measurements of low Z elements are possible with careful analysis procedures.
- Subjects
ENERGY dispersive X-ray spectroscopy; FLUORESCENCE yield; CONDUCTION electrons; X-ray microanalysis; CHEMICAL bonds
- Publication
Microscopy & Microanalysis, 2024, Vol 30, p1
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1093/mam/ozae044.083