Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleNonequilibrium segregation of phosphorus in the system silicon dioxide-siliconAuthorsAleksandrov, O. V.; Afonin, N. N.PublicationSemiconductors, 1998, Vol 32, Issue 1, p15ISSN1063-7826Publication typeArticleDOI10.1134/1.1187351