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- Title
Characteristics of scanning magnetic field-type coaxial ECR plasma for inner coating of slender tubes.
- Authors
Morisaki, Eiichiro; Nagano, Tetsuhira; Fujiyama, Hiroshi
- Abstract
We have developed an inner coating system by using transported coaxial ECR plasmas. The ECR plasmas generated inside a coaxial tube were transported along the tube axis by controlling applied magnetic field. The ECR plasma was generated near the resonance points as the pressure was decreased. It was found that the control of plasma position was possible at pressures below 1 mTorr. Increases of the electron density and the deposition rate were achieved by generating a mirror magnetic field. © 1999 Scripta Technica, Electr Eng Jpn, 130(2): 18–24, 2000
- Subjects
COAXIAL cables; MAGNETIC fields; ELECTRON distribution; PLASMA gases; DENSITY
- Publication
Electrical Engineering in Japan, 2000, Vol 130, Issue 2, p18
- ISSN
0424-7760
- Publication type
Article
- DOI
10.1002/(SICI)1520-6416(20000130)130:2<18::AID-EEJ3>3.0.CO;2-Q