Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleLinear array of complementary metal oxide semiconductor double-pass metal micromirrors.AuthorsBühler, Johannes; Steiner, Franz-Peter; Hauert, Roland; Baltes, HenryPublicationOptical Engineering, 1997, Vol 36, Issue 5, p1391ISSN0091-3286Publication typeArticleDOI10.1117/1.601346