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- Title
(Hf,Zr)O<sub>2</sub>‐based Ferroelectrics: From Fundamentals to Applications.
- Authors
Barabash, Sergey V.; Park, Min Hyuk; Schenk, Tony
- Abstract
It is a great pleasure for us to present this Special Issue in I physica status solidi (RRL) - Rapid Research Letters i devoted to the rapidly developing field of HfO SB 2 sb /ZrO SB 2 sb -based ferroelectrics, related to the I Symposium Q i held at the 2021 I E-MRS Fall Meeting i . Wang et al. [2100572] seek to develop BEOL-compatible physical vapor deposition of ferroelectric HZO capacitors for memory applications such as ferroelectric field-effect transistors (FeFETs). (Hf,Zr)O2-based Ferroelectrics: From Fundamentals to Applications.
- Subjects
FERROELECTRIC crystals; INDIUM gallium zinc oxide; LEAD titanate; ELECTRON energy loss spectroscopy; STATIC random access memory
- Publication
Physica Status Solidi - Rapid Research Letters, 2022, Vol 16, Issue 10, p1
- ISSN
1862-6254
- Publication type
Article
- DOI
10.1002/pssr.202200324