We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings.
- Authors
Kuznetsova, T. A.; Zubar, T. I.; Lapitskaya, V. A.; Sudilovskaya, K. A.; Chizhik, S. A.; Uglov, V. V.; Shimanskii, V. I.; Kvasov, N. T.
- Abstract
Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force microscopy with multi-pass scanning. The dependences of the friction coefficients on the number of passes are obtained. A significant effect of annealing on a decrease in the friction coefficients of AlSiN films is detected.
- Publication
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2019, Vol 13, Issue 1, p36
- ISSN
1027-4510
- Publication type
Article
- DOI
10.1134/S1027451019010117