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- Title
High-frequency micromechanical resonators from aluminium–carbon nanotube nanolaminates.
- Authors
Jung Hoon Bak; Young Duck Kim; Seung Sae Hong; Byung Yang Lee; Seung Ran Lee; Jae Hyuck Jang; Miyoung Kim; Kookrin Char; Seunghun Hong; Yun Daniel Park
- Abstract
At micro- and nanoscales, materials with high Young’s moduli and low densities are of great interest for high-frequency micromechanical resonator devices. Incorporating carbon nanotubes (CNTs), with their unmatched properties, has added functionality to many man-made composites. We report on the fabrication of ≤100-nm-thick laminates by sputter-deposition of aluminium onto a two-dimensional single-walled CNT network. These nanolaminates—composed of Al, its native oxide Al2O3 and CNTs—are fashioned, in a scalable manner, into suspended doubly clamped micromechanical beams. Dynamic flexural measurements show marked increases in resonant frequencies for nanolaminates with Al–CNT laminae. Such increases, further supported by quasi-static flexural measurements, are partly attributable to enhancements in elastic properties arising from the addition of CNTs. As a consequence, these nanolaminate micromechanical resonators show significant suppression of mechanical nonlinearity and enhanced strength, both of which are advantageous for practical applications and analogous to biological nanocomposites, similarly composed of high-aspect-ratio, mechanically superior mineral platelets in a soft protein matrix.
- Subjects
NANOTUBES; ELASTICITY; RESONATORS; ALUMINUM; FULLERENES
- Publication
Nature Materials, 2008, Vol 7, Issue 6, p459
- ISSN
1476-1122
- Publication type
Article
- DOI
10.1038/nmat2181