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- Title
Effect of Substrate Temperature on Structural, Morphological, and Optical Properties of Gallium Oxide Thin Films Deposited by RF-Sputtering.
- Authors
YILDIZ, Fevkani; AKCAY, Hulya; ASTAM, Aykut; KUNDAKCI, Mutlu
- Abstract
In this paper, gallium oxide (Ga2O3) thin films at various substrate temperatures (Ts) were grown on Indium Tin Oxide (ITO), glass, p-type silicon by radio-frequency magnetron sputtering (RFMS). We investigated how structural, morphological and optical properties change with various Ts. XRD results of thin films grown on p-type silicon substrate suggest that crystallinity properties of synthesized thin films strongly depend on the Ts. From SEM and AFM analyses of Ga2O3 thin films grown on p-type silicon substrate, it was observed that when the temperature increased, a porous structure appeared, and the grain size changed depending on the Ts. Moreover, obtained results from the absorption measurements, the bandgap energy of Ga2O3 thin films grown on the p-type silicon substrate decreased with increasing substrate temperature.
- Subjects
SUBSTRATES (Materials science); THIN films analysis; MAGNETRON sputtering; THIN films; INDIUM tin oxide
- Publication
Gazi University Journal of Science, 2024, Vol 37, Issue 3, p1498
- ISSN
1303-9709
- Publication type
Article
- DOI
10.35378/gujs.1275066