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- Title
Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures.
- Authors
Cheng-Wen Ma; Fu-Wei Lee; Hsin-Hung Liao; Wen-Cheng Kuo; Yao-Joe Yang
- Abstract
We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young's modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system.
- Subjects
MICROELECTROMECHANICAL systems; DIGITAL-to-analog converters; ELECTRONIC data processing; DIGITAL electronics; PARYLENE
- Publication
Sensors (14248220), 2015, Vol 15, Issue 9, p21567
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s150921567