Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleHydrogen-plasma-induced Rapid, Low-Temperature Crystallization of μm-thick a-Si:H Films.AuthorsZhou, H. P.; Xu, M.; Xu, S.; Liu, L. L.; Liu, C. X.; Kwek, L. C.; Xu, L. X.PublicationScientific Reports, 2016, p32716ISSN2045-2322Publication typeArticleDOI10.1038/srep32716