Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitlePoint Defects and Alloy Incorporation in Ultrawide Bandgap β -(AlxGa1-x)2O3 Films.AuthorsHuang, Hsien-Lien; Johnson, Jared; Chae, Chris; Bhuiyan, A F M Anhar Uddin; Feng, Zixuan; Kalarickal, Nidhin Kurian; Rajan, Siddharth; Zhao, Hongping; Hwang, JinwooPublicationMicroscopy & Microanalysis, 2021, Vol 27, p2140ISSN1431-9276Publication typeAbstractDOI10.1017/S1431927621007728