Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleGeneration of Positive and Negative Oxygen Ions in Magnetron Discharge During Reactive Sputtering of Alumina.AuthorsPokorný, Petr; Bulíř, Jiří; Lančok, Ján; Musil, Jindřich; Novotný, MichalPublicationPlasma Processes & Polymers, 2010, Vol 7, Issue 11, p910ISSN1612-8850Publication typeArticleDOI10.1002/ppap.201000064