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- Title
P-93: Highly Reliable Mobile Liquid Crystal Display using AIO<sub>x</sub> Deposited By Atomic Layer Deposition for Side Sealing Structure.
- Authors
Ishitani, Tetsuji; Kubota, Daisuke; Nakano, Masaru; Kubota, Yusuke; Moriya, Koji; Yamashita, Akio; Sakurada, Yujiro; Kusunoki, Koji; Shishido, Hideaki; Sugimoto, Kazuya; Hirakata, Yoshiharu; Yamazaki, Shunpei; Hayakawa, Masahiko
- Abstract
A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition (ALD) apparatus was employed. This structure can prevent the entry of external moisture. A liquid crystal display (LCD) with this type of structure can have long-term high reliability as a low-frequency driving LCD.
- Subjects
LIQUID crystals; OPTICAL materials; LIQUID crystal displays; ATOMIC layer deposition; CHEMICAL vapor deposition; ATOMIC layer epitaxial growth
- Publication
SID Symposium Digest of Technical Papers, 2015, Vol 46, Issue 1, p1507
- ISSN
0097-966X
- Publication type
Article
- DOI
10.1002/sdtp.10052