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- Title
Analytical advances in the SEM.
- Authors
Scott, John J.
- Abstract
The article focuses on analytical advances in the scanning electron microscope (SEM). It informs that the SEM, with one or more X-ray spectrometers, is undoubtedly one of the most powerful tools ever devised for the chemical analysis of solid samples at micrometer and submicrometer length scales. The two most common X-ray spectrometers used with SEMs are the wavelength-dispersive spectrometer and the energy-dispersive spectrometer (EDS). After more than three decades of evolutionary change in the field of electron-beam microanalysis, recent advances in the technology of X-ray detectors promise to advance the capabilities of EDS systems by leaps and bounds.
- Subjects
SCANNING electron microscopes; LOW-voltage scanning electron microscopy; ANALYTICAL chemistry; THICKNESS measurement; DETECTORS; ELECTRON microscopes
- Publication
Analytical & Bioanalytical Chemistry, 2003, Vol 375, Issue 1, p38
- ISSN
1618-2642
- Publication type
Article
- DOI
10.1007/s00216-002-1615-1