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- Title
Thermal Properties Measurement of Micro-electromechanical System Sensors by Digital Moiré Method.
- Authors
Shang, H.; Xie, H.; Wang, X.; Jiang, S.; Dai, F.; Wang, W.; Fang, Y.; Zhao, Y.
- Abstract
The thermal properties of a micro-electromechanical system sensor were analysed by a novel digital moiré method. A double-layer micro-cantilever sensor (60 μm long, 10 μm width and 2 μm thick) was prepared by focused ion beam milling. A grating with frequency of 5000 lines mm−1 was etched on the cantilever. The sensor was placed into a scanning electron microscope system with a high temperature device. The observation and recording of the thermal deformation of the grating were realised in real-time as the temperature rose from room temperature to 300 °C at intervals of 50 °C. Digital moiré was generated by interference of the deformed grating and a digital virtual grating. The thermal properties including strain distribution of the sensor and the linear expansion coefficient of polysilicon were accurately measured by the phase-shifted moiré patterns.
- Subjects
DETECTORS; ELECTROMECHANICAL devices; FOCUSED ion beams; SCANNING electron microscopy; DEFORMATIONS (Mechanics)
- Publication
Strain, 2005, Vol 41, Issue 4, p157
- ISSN
0039-2103
- Publication type
Article
- DOI
10.1111/j.1475-1305.2005.00226.x