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- Title
Sensors in Network (2)--Fabrication Technologies--.
- Authors
Kazusuke Maenaka
- Abstract
The article discusses the fundamental principle of fabrication technologies and their history. Topics included here are the surface and bulk micromachining, comparison between monolithic and hybrid integration, the thin-film deposition technology, and the fabrication of micro-electromechanical systems sensors.
- Subjects
FABRICATION (Manufacturing); MANUFACTURING processes; MICROMACHINING; THIN film deposition; SOLID state physics; ELECTROMECHANICAL technology
- Publication
Sensors & Materials, 2016, Vol 28, Issue 8, p927
- ISSN
0914-4935
- Publication type
Article
- DOI
10.18494/sam.2016.1428