Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleHydrogenated amorphous silicon based surface passivation of c-Si at high deposition temperature and rate.AuthorsIlliberi, A.; Creatore, M.; Kessels, W. M. M.; van de Sanden, M. C. M.PublicationPhysica Status Solidi - Rapid Research Letters, 2010, Vol 4, Issue 8/9, p206ISSN1862-6254Publication typeArticleDOI10.1002/pssr.201004234