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- Title
Toward sub-micron oxide thin-film transistors for digital holography.
- Authors
Choi, Ji Hun; Pi, Jae‐Eun; Hwang, Chi‐Young; Yang, Jong‐Heon; Kim, Gi Heon; Kim, Yong‐Hae; Kim, Hee‐Ok; Kwon, Oh‐Sang; Park, Eun‐Suk; Hwang, Chi‐Sun
- Abstract
High-performance 2- μm-channel oxide thin-film transistors (TFT) on glass substrate for a 7- μm-pixel-pitch spatial light modulator panel for digital holography applications were fabricated using a two-step source/drain etching process. It showed a μ FE of 45.5 cm2/Vs, SS of 0.10 V/dec, and Von of near zero voltage. Furthermore, we succeeded in the demonstration of sub-micron TFTs, which is an indispensable route to next-generation spatial light modulation devices with near 1- μm pixel pitch. The issue of short-channel transistors for display applications is also introduced. Finally, the digital holographic demonstration results based on the fabricated backplane are presented.
- Subjects
DIGITAL holographic microscopy; THIN film transistors; SPATIAL light modulators; OPTICAL modulators; THIN film devices
- Publication
Journal of the Society for Information Display, 2017, Vol 25, Issue 2, p126
- ISSN
1071-0922
- Publication type
Article
- DOI
10.1002/jsid.535