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- Title
Characterization, optimization and surface physics aspects of in situ plasma mirror cleaning.
- Authors
Pellegrin, Eric; Sics, Igors; Reyes-Herrera, Juan; Sempere, Carlos Perez; Alcolea, Juan Josep Lopez; Langlois, Michel; Rodrigueza, Jose Fernandez; Carlino, Vincent
- Abstract
Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still under development. In this study an analysis of remediation strategies all based on in situ low-pressure RF plasma cleaning approaches is reported, including a quantitative determination of the optimum process parameters and their influence on the chemistry as well as the morphology of optical test surfaces. It appears that optimum results are obtained for a specific pressure range as well as for specific combinations of the plasma feedstock gases, the latter depending on the chemical aspects of the optical surfaces to be cleaned.
- Subjects
CARBON products manufacturing; PRESSURE regulators; SYNCHROTRONS; FORCE density; PRESSURE gages
- Publication
Journal of Synchrotron Radiation, 2014, Vol 21, Issue 2, p300
- ISSN
0909-0495
- Publication type
Article
- DOI
10.1107/S1600577513032402