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- Title
Fabrication, characterisation and application of (8 mol% Y<sub>2</sub>O<sub>3</sub>) ZrO<sub>2</sub> thin film on Na<sub>3</sub>Zr<sub>2</sub>Si<sub>2</sub>PO<sub>12</sub> substrate for sensing CO<sub>2</sub> gas.
- Authors
Wang, L.; Pan, L.; Sun, J.; Hong, Y. R.; Kale, G. M.
- Abstract
A planar type CO2 gas sensor employing (8 mol% Y2O3) ZrO2 (YSZ) thin film on Na3Zr2Si2PO12 (Nasicon) substrate with Na2CO3 as an auxiliary electrode has been fabricated and tested in laboratory environment between 700-900 K. The YSZ thin film was fabricated on Nasicon and alumina substrate using radio frequency (RF) magnetron sputtering. The film was examined using SEM and X-ray diffraction (XRD) after treating the Nasicon-YSZ bi-layer structure at 1300 K for 2 h. The results indicate that a crack free YSZ film was produced on Nasicon surface that was well bonded to the substrate. The conductivity of sputtered YSZ thin film measured by ac-impedance spectroscopy has been found to be higher than that of YSZ pellet by approximately half an order of magniture. The bi-electrolyte planar sensor displays rapid response (t95= 200 s) to CO2 compared to the tube type sensor (t95= 700 s) and the measured open circuit voltage of the electrochemical CO2 sensor has been found to be Nernstian at all temperatures.
- Subjects
LABORATORIES; X-ray diffraction; ELECTRODES; MAGNETRONS; RADIO frequency; THIN films
- Publication
Journal of Materials Science, 2005, Vol 40, Issue 7, p1717
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-005-0674-z