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- Title
Temporal response of silicon EUV and soft X-ray detectors.
- Authors
Artyomov, A.; Baksht, E.; Tarasenko, V.; Fedunin, A.; Chaikovsky, S.; Aruev, P.; Zabrodskii, V.; Petrenko, M.; Sobolev, N.; Suhanov, V.
- Abstract
A small-sized generator of picosecond electron beams is used to measure the temporal resolution of EUV and soft X-ray silicon detectors produced by the Ioffe Physical Technical Institute, Russian Academy of Sciences. The temporal resolution of the EUV and soft X-ray detectors based on silicon photodiodes is shown to be ∼1 ns. Preliminary experiments have been performed using these detectors with the aim of investigating the radiation characteristics of a soft X-ray source based on an X-pinch driven by a small-sized highcurrent generator with a current pulse amplitude of 250 kA. This source is used at the Institute of High Current Electronics for soft X-ray backlighting diagnostics of various plasmas.
- Subjects
X-ray detection; ELECTRON beams; EXTREME ultraviolet lithography; SILICON detectors; PHOTODIODES; PLASMA gases
- Publication
Instruments & Experimental Techniques, 2015, Vol 58, Issue 1, p102
- ISSN
0020-4412
- Publication type
Article
- DOI
10.1134/S0020441215010017