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- Title
Charge and Size Distribution of Clusters Formed in Ion Sputtering of Metals.
- Authors
Matveev, V. I.
- Abstract
Description of the sputtering of metals by ion bombardment, in which large neutral or charged clusters are produced with the number of atoms N ≥ 5, is further elaborated using simple physical assumptions. The results obtained, represented by simple formulas, are in agreement with experiment. By way of example, calculations of the mass spectra of neutral and singly charged clusters produced by ion sputtering of tantalum and the ionization coefficients of silver clusters are presented.
- Subjects
SPUTTERING (Physics); ION bombardment; CHARGE transfer; PARTICLE size determination
- Publication
Technical Physics, 2002, Vol 47, Issue 6, p767
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/1.1486202