We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
CMOS-compatible, AlScN-based integrated electro-optic phase shifter.
- Authors
Yoshioka, Valerie; Jin, Jicheng; Zhou, Haiqi; Tang, Zichen; Olsson III, Roy H.; Zhen, Bo
- Abstract
Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic phase shifting and modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in Al0.80Sc0.20N-based phase shifters. We utilized the TM0 mode, allowing use of the r33 electro-optic coefficient, and demonstrated VπL around 750 V cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics.
- Subjects
PHASE shifters; PHASE modulation; PHOTONICS; SCALABILITY; POSSIBILITY
- Publication
Nanophotonics (21928606), 2024, Vol 13, Issue 18, p3327
- ISSN
2192-8606
- Publication type
Article
- DOI
10.1515/nanoph-2024-0263