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- Title
Influence of Crystallization on the 3D Structure of Pores in Ferroelectric PZT Films.
- Authors
Atanova, A. V.; Khmelenin, D. N.; Zhigalina, O. M.
- Abstract
The structure of porous lead titanate–zirconate films, obtained by chemical deposition from solutions containing Brij 76, has been visualized for the first time using focused ion beam scanning electron microscopy nanotomography. Several techniques for determining the connectivity of pores and their distribution are presented. It is shown that the films have a highly connected system of pores regularly distributed in sublayers; this system is formed during multilayer deposition and subsequent crystallization.
- Subjects
POROSITY; FOCUSED ion beams; CHEMICAL solution deposition; CRYSTALLIZATION; EXCIMER lasers; SCANNING electron microscopy
- Publication
JETP Letters, 2022, Vol 116, Issue 10, p716
- ISSN
0021-3640
- Publication type
Article
- DOI
10.1134/S0021364022602056