Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.Title39‐4: TFT Integrated Microelectromechanical Shutter for Display Application.AuthorsAl Nusayer, Sheikh Abdullah; Schalberger, Patrick; Baur, Holger; Fruehauf, NorbertPublicationSID Symposium Digest of Technical Papers, 2018, Vol 49, Issue 1, p498ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.12610