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- Title
Grain orientation dependence on distance to surface of CVD diamond film.
- Authors
Mao, W.; Zhu, H.; Chen, L.; Feng, H.; Lü, F.
- Abstract
Free standing chemical vapour deposition (CVD) diamond films were prepared under the gas recycling mode, where the substrate temperature ranged from 820 to 1050°C. Macro- and microtextures of the films were investigated based on the orientation distribution function (ODF) and electron backscatter diffraction (EBSD) analysis. The texture consisted of <001>, <112>, <111>, <221> and <110> fibre components. Very high twinning frequency was observed because of the reduced purity of the deposition gas. The multi-twins appearing in series as well as in paratactic form reduced the grain size and randomised the orientation distribution. It is believed that the residual strain and stress in diamond films should relate to the fibre textures in certain extent because of the anisotropic elastic characteristics of diamond crystals.
- Subjects
DIAMONDS; NATIVE element minerals; CHEMICAL vapor deposition; DISTRIBUTION (Probability theory); THIN films; MICROSTRUCTURE; CRYSTALS
- Publication
Materials Science & Technology, 2005, Vol 21, Issue 12, p1383
- ISSN
0267-0836
- Publication type
Article
- DOI
10.1179/174328405X71567