Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleModeling of a high force density fishbone shaped electrostatic comb drive microactuator.AuthorsMegat Hasnan, Megat Muhammad Ikhsan; Mohd Sabri, Mohd Faizul; Mohd Said, Suhana; Nik Ghazali, Nik NazriPublicationScientific World Journal, 2014, p912683ISSN1537-744XPublication typejournal articleDOI10.1155/2014/912683