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- Title
Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions.
- Authors
Bae, Joohyeon; Lee, Hyunsuk; Seo, Duckhyeon; Yun, Sangdu; Yang, Jeonghyeon; Huh, Sunchul; Jeong, Hyomin; Noh, Jungpil
- Abstract
TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.
- Subjects
THIN films; GRAIN size; MAGNETRON sputtering; NICKEL-titanium alloys; METALLIC thin films; SHAPE memory alloys
- Publication
Materials (1996-1944), 2020, Vol 13, Issue 14, p3229
- ISSN
1996-1944
- Publication type
Article
- DOI
10.3390/ma13143229