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- Title
PZT FILMS PREPARED BY TVA AND PLD FROM PbO<sub>2</sub>:TiO<sub>2</sub>:ZrO<sub>2</sub> (1:1:1) NANOCERAMIC TARGETS.
- Authors
SAVASTRU, D.; TENCIU, D.; LUNGU, C. P.; VIESPE, C.; GRIGORIU, C.; IORDANESCU, R.; FERARU, I. D.; IONESCU, V.; MONNEREAU, O.; TORTET, L.; NOTONIER, R.; GRIGORESCU, C. E. A.
- Abstract
Lead zirconate titanate (PZT) thin films on Si single crystal were prepared by two techniques: a) thermionic vacuum arc (TVA) and b) pulsed laser deposition (PLD), using ceramic targets made of PbO2, ZrO2 and TiO2 nanopowders. Structural characterisation of the samples by XRD, EDS and micro-Raman spectroscopy reveals combinations of PZT and its constituent oxides resulting from either experiment. Morphology studies carried out by SEM and AFM remark a smoother surface for the PLD films than for the TVA ones. A comparison between the ablated and the raw zones of the PLD target leads to the conclusion that the laser-ceramic interaction eases the PZT synthesis.
- Subjects
LEAD zirconate titanate; THERMIONIC emission; CERAMICS; SCANNING electron microscopy; RAMAN spectroscopy
- Publication
Digest Journal of Nanomaterials & Biostructures (DJNB), 2011, Vol 6, Issue 1, p207
- ISSN
1842-3582
- Publication type
Article