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- Title
Room Temperature Ethanol Gas Sensor Based on Slits Mesoporous Silicon.
- Authors
Abed, Husam R.; Alwan, Alwan M.; Zayer, Mehdi Q.
- Abstract
In order to increase the surface area to be used for a high sensor detection, crystalline silicon was etched by a photoelectrochemical etching process. For the examination of sensor performance, a simple, low-cost, and non-toxic method has been applied. This method depends on measuring the resonance frequency when the gas exposes the sample surface. For the optimization purpose, two different electrode connections have been used to select the best configuration (top-bottom electrode and bottom electrode). The current-frequency characteristics showed that the best method of electrode connection is the bottom electrode. The sensing features based on porous silicon have shown a high detection toward ethanol gas molecules represented by a high maximum current and the shifting of resonance frequency that leads to a measurable sensing. Moreover, other factors, including the response time, recovery time, and sensitivity have also been estimated, and it was found that this sensor has a rapid and high response toward the low concentrations of ethanol gas molecules.
- Subjects
GAS detectors; PHOTOELECTROCHEMICAL etching; POROUS silicon; SILICON; ETHANOL; SURFACE area
- Publication
Journal of Electronic Materials, 2022, Vol 51, Issue 8, p4337
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-022-09691-8