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- Title
Diffusion of iron in lithium niobate: a secondary ion mass spectrometry study.
- Authors
Ciampolillo, M.; Argiolas, N.; Zaltron, A.; Bazzan, M.; Sada, C.
- Abstract
Iron-doped X-cut lithium niobate crystals were prepared by means of thermal diffusion from thin film varying in a systematic way the process parameters such as temperature and diffusion duration. Secondary Ion Mass Spectrometry was exploited to characterize the iron in-depth profiles. The evolution of the composition of the Fe thin film in the range between 600°C and 800°C was studied, and the diffusion coefficient at different temperatures in the range between 900°C and 1050°C and the activation energy of the diffusion process were estimated.
- Subjects
DIFFUSION; IRON; LITHIUM niobate; SECONDARY ion mass spectrometry; THIN films; THERMAL analysis; SEMICONDUCTOR doping
- Publication
Applied Physics A: Materials Science & Processing, 2011, Vol 105, Issue 1, p111
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-011-6559-x