Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTermine: Vakuum in Forschung und Praxis 5/2022.PublicationVakuum in Forschung und Praxis, 2022, Vol 34, Issue 5, p55ISSN0947-076XPublication typeArticleDOI10.1002/vipr.202270507