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- Title
Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography.
- Authors
H. Okayama; D. Shimura; H. Takahashi; M. Seki; M. Toyama; T. Sano; K. Koshino; N. Yokoyama; M. Ohtsuka; A. Sugiyama; S. Ishitsuka; T. Tsuchizawa; H. Nishi; K. Yamada; H. Yaegashi; T. Horikawa; H. Sasaki
- Abstract
An Si wire array waveguide grating wavelength demultiplexer fabricated using immersion ArF lithography is reported. The tilt directions of the input and output star couplers are aligned in the same direction to avoid phase error generated at the curved waveguides. A 16 channel device with 200 GHz wavelength spacing was fabricated.
- Subjects
SILICON; WAVEGUIDES; STAR couplers; ARGON fluorides; EXCIMERS; IMMERSION lithography
- Publication
Electronics Letters (Wiley-Blackwell), 2013, Vol 49, Issue 6, p1
- ISSN
0013-5194
- Publication type
Article
- DOI
10.1049/el.2013.0206