Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleOberflächenanalytik.AuthorsKopnarski, MichaelPublicationVakuum in Forschung und Praxis, 2015, Vol 27, Issue 2, p42ISSN0947-076XPublication typeOtherDOI10.1002/vipr.201590016