Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleOberflächen als Schlüsselkomponente.AuthorsLeson, AndreasPublicationVakuum in Forschung und Praxis, 2006, Vol 18, Issue 3, p3ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200690035