Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleUnternehmen & Personen - Vakuum in Forschung und Praxis 5/2003.PublicationVakuum in Forschung und Praxis, 2003, Vol 15, Issue 5, p230ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200390040