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- Title
Deposition of Functional Coatings from an Acetylene-Containing Plasma at Atmospheric Pressure.
- Authors
Plevako, F.; Gorbatov, S.; Davidovich, P.; Prikhod′ko, E.; Shushkov, S.; Krul′, L.; Butovskaya, G.; Shakhno, O.; Gusakova, S.; Korolik, O.; Mazanik, A.
- Abstract
Properties of thin coatings formed on polymer and glass substrates by plasma-enhanced chemical vapor deposition from a mixture of nitrogen with acetylene at atmospheric pressure were investigated. It was established that chemically stable transparent films with a mass ratio of fixed carbon and nitrogen C:N ~ 2:1 are formed on the surface of these substrates. When the deposition time was increased, arrays of dendrite-like structures were formed on the substrates.
- Subjects
ACETYLENE; ACETYLENE crystals; FORCE density; ATMOSPHERIC pressure; POLYMERS
- Publication
Journal of Engineering Physics & Thermophysics, 2016, Vol 89, Issue 2, p471
- ISSN
1062-0125
- Publication type
Article
- DOI
10.1007/s10891-016-1398-4