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- Title
Development of the technique of laser diagnostics of solids under pulsed optical irradiation.
- Authors
Galyautdinov, M. F.; Farrakhov, B. F.; Fattakhov, Ya. V.; Zakharov, M. V.
- Abstract
technique based on the recording of a Fraunhofer diffraction pattern and allowing studies of structural and phase transitions in an ion-implantion-doped semiconductor layer with a high time resolution simultaneously with sample-temperature measurements is described. For this purpose, two measuring diffraction gratings—phase and amplitude—are preliminarily formed on the surface of a silicon plate. Solid-phase recrystallization and melting processes were studied using the kinetics of disappearance and appearance of diffraction peaks from the amplitude grating. The sample temperature was monitored by the deviation of the diffraction angle of a probing laser beam from the phase diffraction grating caused by a change in the grating period resulting from its thermal expansion.
- Subjects
DIFFRACTION patterns; PHASE transitions; IRRADIATION; THERMAL expansion; FRAUNHOFER lines
- Publication
Instruments & Experimental Techniques, 2010, Vol 53, Issue 4, p607
- ISSN
0020-4412
- Publication type
Article
- DOI
10.1134/S002044121004024X