Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleInternational Symposium on Atomic Level Characterizations for New Materials and Devices in Winter 2024.Authors長谷川修司; 小野輝男; 柚原淳司PublicationVacuum & Surface Science, 2024, Vol 67, Issue 4, p192ISSN2433-5835Publication typeArticleDOI10.1380/vss.67.192